29pA22P Study on Substrate Temperature in TiO2 Film Fabrication
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概要
- 論文の詳細を見る
- 社団法人プラズマ・核融合学会の論文
- 2002-11-20
著者
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Umeno M.
Chubu University
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Ikezawa S.
Chubu University
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Homyara H.
Chubu University
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Yoshimura K.
National Institute of Advanced Industrial Science and Technology. (AIST)
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Taoda H.
National Institute of Advanced Industrial Science and Technology. (AIST)
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Hara T.
Toyota Technological Institute
関連論文
- 29pA22P Study on Substrate Temperature in TiO2 Film Fabrication
- Fabrication of Asphrical Mirrors for Soft X-ray Optics