Properties of MgO Films Prepared by Ion Beam-Assisted Evaporation (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)

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概要

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• MgO films have been prepared by ion beam-assisted deposition for a protective layer of plasma display panel. Properties of the deposited films and relationships between the deposition parameters and the properties have been investigated. The deposited films are dense and adhesive to substrate, and exhibit(200)preferable orientation. The orientation of MgO films was affected by ion energy, substrate temperature, growth rate and annealing.

• 一般社団法人映像情報メディア学会の論文
• 2000-10-20

著者

• Hu Wunbo

  Institute Of Physical Electronics And Devices Xi'an Jiaotong University

• Yu Zhinong

  Institute Of Physical Electronics And Devices Xi'an Jiaotong University

• Zheng Dexiu

  Institute Of Physical Electronics And Devices Xi'an Jiaotong University

• Suu Jian

  Institute of Physical Electronics and Devices, Xi'an Jiaotong University

• Suu Jian

  Institute Of Physical Electronics And Devices Xi'an Jiaotong University

関連論文

• Properties of MgO films prepared by ion beam-assisted evaporation
• Properties of MgO Films Prepared by Ion Beam-Assisted Evaporation (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)

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