Analysis of Triple Co Alloy Layer Magnetic Thin Film with Different Bias Configuration (第4回アジア情報記録技術シンポジウム)
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概要
- 論文の詳細を見る
Using substrate bias configuration, triple CoCrPt layer magnetic thin films were deposited by DC magnetron sputtering on CrV and glass substrate. Coercivity showed an increase for films with bias sputtered CoCrPt layer in which coercivity(H_C)was optimized for NB-B-NB type film deposited at higher temperature(300℃)(NB:no bias and B:bias applied in sputtering). Size reduction of the magnetic domains was observed by Magnetic Force Microscope. On the other hand, Secondary Ion Mass Spectroscopy study found no remarkable composition variance for Co and Cr element in depth scale. Crystal grain morphology and structure was studied by transmission electron microscope. Bias-sputtering-caused defects, slight composition changes and interfacial diffusion were discussed to explain the improvement of magnetic properties.
- 社団法人映像情報メディア学会の論文
- 1999-11-09
著者
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Wang Jian
Data Storage Institute
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GONG Hao
Material Science Department, National University of Singapore
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Gong Hao
Material Science Department National University Of Singapore
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Wang Jian
Data Storage Institute 5 Engineering Drive 1
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JIN Dian
Data Storage Institute, 5 Engineering Drive 1
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Jin Dian
Data Storage Institute 5 Engineering Drive 1:material Science Department National University Of Sing
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Jin Ding
Data Storage Institute, 5 Engineering Drive 1:Material Science Department, National University of Singapore
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Wang Jiang
Data Storage Institute, 5 Engineering Drive 1
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