6.3 Manufacturable Sputter-Deposited Indium Tin Oxide Thin Films Via Optical Emission Spectroscopy Closed-Loop Process Control(6.THIN FILM MATERIALS AND DEPOSITION)(1999 Display Manufacturing Technology Conference Report)

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概要

• 論文の詳細を見る
• 社団法人映像情報メディア学会の論文
• 1999-03-12

著者

• Engle I.r.

  Materials Research Group Inc.

• Eisgruber I.L

  Materials Research Group, Inc.

• Hollingsworth R.E.

  Materials Research Group, Inc.

• Bhat P.K.

  Materials Research Group, Inc.

• Wendt R.

  Global Solar Energy

• Bhat P.k.

  Materials Research Group Inc.

• Eisgruber I.l

  Materials Research Group Inc.

• Hollingsworth R.e.

  Materials Research Group Inc.

関連論文

• 6.3 Manufacturable Sputter-Deposited Indium Tin Oxide Thin Films Via Optical Emission Spectroscopy Closed-Loop Process Control(6.THIN FILM MATERIALS AND DEPOSITION)(1999 Display Manufacturing Technology Conference Report)

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