BF-05 Plasma Effects on The Co-Cr Deposition in Opposing Targets Sputtering Method(Report on Intermag-MMM Conference in 1982)
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概要
著者
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Kadokura S.
Central Res. Inst. Teijin Ltd.
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Naoe M.
Tokyo Inst.tech
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Tomie T.
Central Res. Inst., Teijin Ltd.
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Naoe M.
Tokyo Inst. Of Tech.
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Tomie T.
Central Res. Inst. Teijin Ltd.
関連論文
- Compensation of demagnetizing field in remanence measurements of perpendicular magnetic recording films
- BF-05 Plasma Effects on The Co-Cr Deposition in Opposing Targets Sputtering Method(Report on Intermag-MMM Conference in 1982)
- Optimization of deposition temperature for paragnetic seed layer in Co-Cr perpendicular recording media