Sputter Texturing Methods for Alterative Substrates
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概要
- 論文の詳細を見る
Thin CoCrTa/Cr films were deposited on glass substrates at various temperature with or without Al micro-bumps. The coercivity of CoCrTa increased considerably by introducing the Al micro-bumps as a texture layer. The cause of the coercivity increase is attributed to the development of stronger (1011) texture of Co grains which is related to lattice expansion of Cr underlayer by Al addition to Cr lattice. The Morphology of CoCrTa/Cr/Al films was also observed. The size and shape of Al micro-bumps was very sensitive to the thickness of the Al films and the substrate temperature.
- 社団法人映像情報メディア学会の論文
- 1994-11-19
著者
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Park J.k.
Department Of Material Science & Engineering Korea Advanced Institute Of Science And Technology
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Lee T.d.
Department Of Advanced Material Engineering Korea Advanced Institute Of Science And Technology
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Shin K.h.
Division Of Metals Korea Institute Of Science And Technology
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Chang H.S.
Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology
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Chang H.s.
Department Of Material Science & Engineering Korea Advanced Institute Of Science And Technology
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