GETTERS FOR SMALL SIZE EMISSIVE DISPLAYS

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概要

• 論文の詳細を見る

• The small internal volume of devices, such as FEDS and in general vacuum packaging of microelectronic devices, makes it more critical the choice of a suitable getter. Besides the geometrical constraints, the getter must meet other requisites: it is often needed that it is activated at temperatures not exceeding 400-500℃, exhibits high sorption performance at room temperature and good mechanical strength. Getters have been developed in different configurations including relatively thin porous layers deposited onto a metal substrate to meet these requirements. The sorption performance of such getter structures, for the main active gases and their physico-mechanical chardcteristics are reviewed and discussed, also giving some applicative hints.

• 社団法人映像情報メディア学会の論文
• 1994-10-27

著者

• Ferrario B.

  Saes Getters Spa

• Borghi M.

  SAES GETTERS SpA

関連論文

• GETTERS FOR SMALL SIZE EMISSIVE DISPLAYS

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