Evaluation of tailored perovskite electrode for(Ba, Sr)TiO_3

概要

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Electrical properties of(Ba, Sr)TiO_3 thin films were investigated in terms of the microstructure and composition of the perovskite (Sr, Ca)RuO_3 bottom electrode. SCR electrode led to the leakage current density(10^<-7>A/cm^2)of BST films about an order lower than that on RuO_2.The leakage current was not sensitive to the composition of SCR electrodes, while the dielectric constant of BST/SCR thin film capacitor ranged from 160 to 280 depending on the Sr/Ca ratio in SCR electrodes.The BST/SCR system resulted in a 5-nm-thick interfacial layer which is about a half of that in BST/Pt.Furthermore, that interfacial layer turned out to be partially crystallized from the lattice image taken by HRTEM.Therefore, the enhancement in electrical properties of BST films is from the improvement of interfacial characteristics originated from the structural matching.
1998-07-23