Polysilicon TFTs for Active Matrix Liquid Crystal Displays (ジャイアントマイクロエレクトロニクスとその応用論文<特集>)
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概要
- 論文の詳細を見る
This paper reviews a wide range of topics which are important in the application of polysilicon TFT technology to AMLCDs. Processing issues associated with the fabrication of polysilicon devices on large area substrates are examined, particularly the critical areas of substrate materials, active layer crystallization and defect passivation. The influence of trap states and channel avalanche multiplication on TFT characteristics are discussed, and the implications of these effects for active matrix and peripheral driver circuit design are considered. Both analog and digital circuits with adequate performance for driving high resolution grey scale AMLCDs are demonstrated.
- 社団法人電子情報通信学会の論文
- 1993-05-25
著者
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Wu I-wei
The Authors Are With The Electronics And Imaging Laboratory Palo Alto Receach Center Xerox Corporati
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Lewis A
Asymtek
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Lewis Alan
The authors are with the Electronics and Imaging Laboratory, Palo Alto Research Center, Xerox Corpor