Fiber-Optic Sensors and Actuators for Environmental Recognition Devices (Special Issue on Optical Fiber Sensors)

概要

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When a micromachine works inside a narrow space inside tubes and equipment such as a microfactory, a microdevice that has a visual function is indispensable. To monitor the minute shapes of microfabrication and microassembly process that are impossible to observe, fiber-optic sensors and actuators for environmental recognition devices have been developed. The devices are designed to allow stereoscopic and microscopic observation and to measure the dimensions of microparts. To achieve these goals and to realize minute structures and functions, we developed environmental recognition devices for microfabrication process with functions of far and near field observation, tactile sensing and tip articulation, for microassembly process with functions of stereoscopic observation and tip articulation. The results show that easy and safe environmental recognition is possible in the narrow spaces of a microfactory.
社団法人電子情報通信学会の論文
2000-03-25