Process Synthesis Using TCAD : A Mixed-Signal Case Study (Special Issue on TCAD for Semiconductor Industries)

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概要

• 論文の詳細を見る

• A complex modular process flow was developed for PRISM technology to permit increased system integration. In order to combine the required functions-submicron CMOS Logic, Nonvolatile Memories, Precision Linear, and Power Drivers-on a monolithic silicon chip, a highly structured, systematic approach to process synthesis was developed. TCAD tools were used extensively for process design and verification.The 60 V LDMOS power transistor and the Flash memory cell built in the technology will be described to illustrate the process synthesis methodology.

• 社団法人電子情報通信学会の論文
• 1999-06-25

著者

• Fujii Ichiro

  Texas Instruments

• SMAYLING Michael

  Texas Instruments Inc.

• Smayling Michael

  Texas Instruments

• RODRIGUEZ John

  Texas Instruments

• YOUNG Alister

  Texas Instruments

関連論文

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• Submicron Optical Lithography Based on a New Interferometric Phase Shifting Technique
• Process Synthesis Using TCAD : A Mixed-Signal Case Study (Special Issue on TCAD for Semiconductor Industries)

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