TCAD Needs and Applications from a User's Perspective (Special Issue on TCAD for Semiconductor Industries)
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概要
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TCAD (Technology Computer Aided Design) is the simulation of semiconductor processes and devices. Despitetwenty years of development, there are still many TCAD skeptics. This paper will discuss some of the problems and limitations of TCAD, present some successful examples of its use, and discuss future simulation needs from a user's perspective. A key point is that the time pressures in modern semiconductor technology de-velopment often dictate the use of simple models for approximate results.
- 一般社団法人電子情報通信学会の論文
- 1999-06-25