A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies (Special Issue on Microelectronic Test Structures)

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概要

• 論文の詳細を見る

• In deep submicron CMOS and BICMOS technologies, antenna effects affect floating gate charge of usual floating gate test structures, dedicated to capacitor matching measurement. In this paper a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, testing method and results are given low several capacitor layouts (poly-poly and metal-metal).

• 社団法人電子情報通信学会の論文
• 1999-04-25

著者

• Roux Dit

  St Microelectronics

• Morin Gerard

  St Microelectronics

• PAILLARDET Frederic

  ST Microelectronics

• MAZALEYRAT Eric

  ST Microelectronics

関連論文

• A New Characterization Method for Accurate Capacitor Matching Measurements Using Pseudo-Floating Gate Test Structures in Submicron CMOS and BICMOS Technologies (Special Issue on Microelectronic Test Structures)

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