Morphological Study of YBa_2Cu_3O_y Thin Films Grown by Excimer Laser Ablation Method (Special Issue on Toward Digital and Analog Applications of Superconductors)

概要

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A close correlation between the YBa_2Cu_3O_y film morphology and location of the (100) MgO substrate during growth by excimer laser ablation was obtained. When the substrate was placed inside the fringe portion of the laser plume,the spiral shape was most clearly seen on the entire film surface for both the conventional and eclipse ablation methods. When the substrate was placed outside the plume, the spiral growth was less pronounced. On the other hand, when the substrate was placed inside the plume core, marked deformation of the morphology occurred, and the superconducting critical temperature was lowered. This correlation was explained to some extent by the spatial variation of kinetic energy of the flying growth species.
社団法人電子情報通信学会の論文
1996-09-25