A New Ceramic Emitter Applicable to a Cleanroom (Special Issue on LSI Memories)

スポンサーリンク

概要

• 論文の詳細を見る

• We deal with a new type ceramic emitter which is used in a cleanroom ionizer system and is composed of a needle-shaped silicon and a rod-shaped silicon carbide ceramics. The discharge test was carried out to investigate the particle generation from the emitter and the degradation of the emitter. As a result, it was found that the ceramic emitter had practically higher performance than a conventional tungsten emitter.

• 社団法人電子情報通信学会の論文
• 1993-11-25

著者

• Okano Kazuo

  Polytechnic University

• Kaminouchi Shigeru

  Tokyo Tekko Co. Ltd.

関連論文

• A New Ceramic Emitter Applicable to a Cleanroom (Special Issue on LSI Memories)
• Basic Characteristics of Ion-balance/neutralizing Current Sensor for AC Corona Air Ionizer using Grounded Ring Electrode

スポンサーリンク