A Uniform and Dense Microwave Plasma(Plasma)(<Special Issue>Recent Trends on Microwave and Millimeter Wave Application Technology)

概要

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Based on an experimental fact that surface wave plasmas excited by strongly coupled microwave through thin dielectric windows show nearly perfect absorption of microwave and, after diffusion, form a widely uniform dense plasma. A plasma with an uniformity of ±5% over an area of 50cm × 60cm was produced. The plasma produced by application of 2400W total microwave power gives 1 × 10^<11> cm^<-3> in density and 1.5eV in electron temperature.
社団法人電子情報通信学会の論文
2003-12-01