A New Cost Model, CPO, for the Evaluation of FAB Performance (Special Issue on Scientific ULSI Manufacturing Technology)

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概要

• 論文の詳細を見る

• A new cost model CPO (Cost of Process Ownership) has been proposed. We have already the well known cost model CEO (Cost of Equipment Ownership) which is a cost index assigned independently to individual equipment. However, CPO is basically a cost index assigned to process step in processing flow chart of actual product in a Fab line. Therefore, it is essentially more effective to evaluate the Fab performance such as cost analysis of process steps, estimation of the whole wafer processing cost for specific product, identification of the bottle neck process step or equipment in a Fab line. Further, in designing a high cost-performance factory or in modifying existing factory, it affords important guide such as optimal scales for both factory and equipments with their investment efficiency.

• 社団法人電子情報通信学会の論文
• 1996-03-25

著者

• ITO Yukiko

  Electronic Devices Group, 1st Manufacturing Technology Department, FUJITSU LIMITED

• OGAWA Hajime

  Electronic Devices Group, 1st Manufacturing Technology Department, FUJITSU LIMITED

• TANI Hiromichi

  Electronic Devices Group, 1st Manufacturing Technology Department, FUJITSU LIMITED

• Ito Y

  Shindengen Kogyo Corp. Hannou‐shi Jpn

• Tani H

  Electronic Devices Group 1st Manufacturing Technology Department Fujitsu Limited

• Ogawa Hajime

  Electronic Devices Group 1st Manufacturing Technology Department Fujitsu Limited

• Tani Hiromichi

  Electronic Devices Group 1st Manufacturing Technology Department Fujitsu Limited

関連論文

• A New Cost Model, CPO, for the Evaluation of FAB Performance (Special Issue on Scientific ULSI Manufacturing Technology)

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