Test Structures and a Modified Transmission Line Pulse System for the Study of Electrostatic Discharge (Special Issue on Microelectronic Test Structure)
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概要
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ElectroStatic Discharge (ESD) testing of integrated circuits subjects circuit elements to very high currents for short periods of time. A modified Transmission Line Pulse (TLP) measurement system for characterizing transistors and other circuit elements under high currents for ESD performance prediction and understanding is presented which can both stress devices and measure leakage. For the TLP system to yield useful information test structures are needed which vary the important design parameters for the circuit elements. Guidelines for transistor test structure design for use with the system are presented and demonstrated for PM0S transistors.
- 一般社団法人電子情報通信学会の論文
- 1996-02-25