Simultaneous Evaluation of Microscopic Defects and Macroscopic 3-D Shape of Planer Object Derived from Specular Reflection Image Sequence

概要

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This paper proposes a precise method of realizing simultaneous measurement of microscopic defects and the macroscopic three-dimensional shapes of planar objects having specular reflection surfaces. The direction vector field of surface tilt is evaluated directly by the introduction of a moving slit-light technique based on computer graphic animation. A reflected image created by the moving slit-light is captured by a video camera, and the image sequence of the slit-light deformation is analyzed. The obtained direction vector field of the surface tilt rceovers the surface shape by means of integration. Two sample objects, a concave mirror and a plane plastic injection molding, are tested to measure the performance of the proposed method. Surface anomalies such as surface dent and warpage are detected quantitatively at a high resolution(about 0.2 [μm])and a high accuracy(about 95%)in a wide area(about l5 [cm])of the test object.
社団法人電子情報通信学会の論文
2001-10-01