A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)

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概要

• 論文の詳細を見る

• A new approach to 3-D profilometry for the white light interferometric (WLI) is presented. The proposed method is the extended depth from focus (EDFF) that determine the zero optical path difference (OPD) from the quantity of fringe contrast degradation of white light interferometer. In the method, the variance of the mismatch function and the modified local variance function are used as the focus measures. The method has a theoretically unlimited range and can profile with subpixel accuracy both optically rough and smooth surfaces without changing algorithm.

• 社団法人電子情報通信学会の論文
• 2001-01-01

著者

• CHOI Tae-Sun

  The authors are with the Department of Mechatronics, Kwangju Institute of Science and Technology

• Choi Tae-sun

  The Authors Are With The Department Of Mechatronics Kwangju Institute Of Science And Technology

• RYOO Seok-Moon

  The authors are with the Department of Mechatronics, Kwangju Institute of Science and Technology

• Ryoo Seok-moon

  The Authors Are With The Department Of Mechatronics Kwangju Institute Of Science And Technology

関連論文

• Shape from Focus Using Multilayer Feedforward Neural Networks
• A New Approach to 3-D Profilometry for the White Light Interferometric (WLI)

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