STUDY ON DIP-COATED ULTRA-THIN LOW SURFACE ENERGY FILMS BY SPECTROSCOPIC PHASE MODULA TED ELLIPSOMETER
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概要
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Low surface energy fluoropolymer films were prepared on silicon substrates by dipcoating process. The thickness of the films was measured by the spectroscopic phase modulated ellipsometer. It has the advantages that measurement can be accomplished faster compared with the conventional rotating analyser ellipsometer, as well as an improvement in precision of the measurement by model fitting the ellipsometer parameter spectrum. We have demonstrated that ultra-thin film of thickness close to monolyer can be formed on Si under controllable dip-coating condition. The surface free energy og the ultra-thin fluoropolymer film determined by contact angle method was found fairly close to documented value. Film propertes obtained by using various solvents in the dip-coating process were studied. In addition, the effect of the duration for the film stayed in the vapor zone will also be presented.
- 社団法人電子情報通信学会の論文
- 2000-11-08
著者
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Ip George
3m Asia Region Fire Protection Market Products And 3m Hong Kong Chemical Group Victoria Center
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Wong Y.W.
Dept.of Applied Physics, The Hong Kong Polytechnic University, Hung Hum
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Wong Y.
Dept. Of Applied Physics The Hong Kong Polytechnic University
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Wong Y.w.
Dept.of Applied Physics The Hong Kong Polytechnic University Hung Hum
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