High quality La-Ca-Mn-O thin films on STO (100) substrates prepared by rf-sputtering

概要

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The fabrication and characterization of La_<0.67>Ca_<0.33>MnO_3 epitaxial thin films on SrTiO_3 (100) substrates by using an off-axis rf sputtering was reported. The obtained La_<0.67>Ca_<0.33>MnO_3 thin films were studied by x-ray diffraction, electrical and magnetic measurements, surface profiler and scanning electron microscope. Very narrow full width at half maximum(〜0.15 deg)of the(004)rocking curve was obtained, indicating good crystallinity. SEM pictures show that our thin films are extra smooth and grain free. The average roughness over the scanning region of 2000um is less than 5 nm. The best value of the peak temperature, which corresponds to the transition temperature from insulator to metal, is as high as 264K. That is the highest value compared with all reported results of La_<0.67>Ca_<0.33>MnO_3 thin films on SrTiO_3 substrates. La_<0.67>Ca_<0.33>MnO_3 thin films even can be deposited under pure argon atmosphers. By post annealing, their peak temperature can also reach the highest value. The dependence of peak temperature on the deposition atmosphere, the annealing temperature and the film thickness was studied in details.
社団法人電子情報通信学会の論文
2000-11-08