Analyses of Delamination Arrest Effect of Dimples on Interface in LSI Package
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概要
- 論文の詳細を見る
The delamination arrest between die pad and resin should be an efficient method to prevent resin cracking of LSI packages. In some LSI packages, dimples arranged on the die pad are effective for delamination arrest. In this study, the effects of dimples on delamination arrest are examined based on boundary element analyses of LSI packages under conditions of thermal and steam pressure loading. To evaluate this effect, the stress intesity factor, K_i, for an interface crack was calculated using the contact between interface crack surfaces. The following main results were obtained. (1)The dimple decreases K_i under both thermal and steam pressure load conditions. (2)The main reason for decreasing K_i is to prevent shearing deformation between crack surfaces under thermal load conditions. Conversely, the reason for the decrease is the kinking of interface crack tips under steam pressure load conditions. (3)The effect of delamination arrest increases as the dimple depth increases.
- 一般社団法人日本機械学会の論文
- 1997-01-15
著者
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Sato Mitsuru
Advanced Material Development Division-1, R&D, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa-mac
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Tani Shuichi
Advanced Technology R&d Center Mitsubishi Electric Corp.
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YOSHIOKA Sumio
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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INOUE Akio
Advanced Technology R&D Center, Mitsubishi Electric Corp.
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IWAOKA Makoto
Itami Office, Mitsubishi Electric Engineering Co.Ltd.
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Iwaoka Makoto
Itami Office Mitsubishi Electric Engineering Co.ltd.
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Yoshioka S
Osaka City Univ. Osaka Jpn
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Sato Mitsuru
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Inoue Akio
Advanced Technology R&d Center Mitsubishi Electric Corp.
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Sato Mitsuru
Advanced Material Development Division-1, R&D, Tokyo Ohka Kogyo Co., Ltd.
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Yoshioka Sumio
Advanced Technology R&D Center, Mitsubishi Electric Corp.
関連論文
- Resist Elution Study for Immersion Lithography
- Analyses of Delamination Arrest Effect of Dimples on Interface in LSI Package