MEMS技術を応用したアクティブ浮上量制御形ヘッドの開発動向

概要

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This paper describes recent advances in MEMS-based active head sliders with micro-actuators for flying height control. The technical issues related to head/disk interface for future ultra-high-density magnetic hard disk drives were investigated and it became clear that active head sliders are a breakthrough technology for achieving ultra-low head/disk interface spacing of less than 10 nm. various attempts to develop active head sliders with micro-actuators are reviewed, and state-of-the-art technologies for active head/disk spacing control are explained. The design procedure and micro-machining process for MEMS-based active sliders are also discussed. In addition, novel multilayered composite PZT thin-film micro-actuators, which are very important functional micro-devices, are studied, and it is shown that the recently developed PZT thin films have better piezoelectric characteristics than not only conventional sol-gel derived PZT thin films but also sputtered PZT thin films. This suggests the feasibility of realizing active sliders operating at lower voltages in ultra-high-density magnetic hard disk drives.
社団法人日本磁気学会の論文
2002-07-01