Preparation Studies of Calcium Sulfide Films for Optical Data Storage

概要

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The preparation of CaS films by magnetron sputtering with the requisite properties for optical recording is studied.Sputtering targets are produced from pressed powders permitting rapid investigation of the optimum dopant concentration of the rare earth ions Eu and Sm.The problem of negative ion re-sputtering is addressed but low sputtering rates remain a problem.
社団法人日本磁気学会の論文
2001-03-15