精密加工技術を用いた新しい構造の半導体ピエゾ抵抗式加速度センサ
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概要
- 論文の詳細を見る
The accelerometer was manufactured by newly developed techniques. Thesensor has cantilever type structure and a detection element that runs parallel to the direction of acceleration.The mainly manufacturing process useddicing saw for cutting the sensor chip.The sensor shows excellent performance such as linearity, frequency response. This paper suggests a new method and new structure for fabricating an accelerometer.
- 社団法人日本時計学会の論文
- 1998-06-10