微小情報機器における高精度圧力測定システムの開発

概要

論文の詳細を見る
As Silicon diaphragm piezoresistive pressure sensors have large temperature coefficient. To measure pressure as high accuracy, temperature compensating was indispensable. On current model, variable resistance or capacitance used to be mounted on board for calibration and temperature compensating. The method has some problems such as Reliability and Mass-Production facility. To improve the problems, we adopted digital signal trimming for calibration and temperature compensating, this realized high accurate pressure sensing.
社団法人日本時計学会の論文
2003-09-10