Characterization of permalloy wires by optical and magneto-optical spectroscopy(Magneto-Optical Effect and Measurement)
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概要
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Spectroscopic ellipsometry, reflectometry and magneto-optical (MO) spectroscopy in the zero and first diffraction orders are used to analyze submicron ultrathin MO gratings. Two different theoretical approaches, a rigorous analysis and an approximate method, are used to simulate the optical and MO response of the gratings. The numerical analysis suggests the presence of native oxide layers on the substrate and capping. A strong spectral anomaly observed in the MO response is identified by the integration of both theoretical approaches. The possibility to monitor the quality and topography of shallow gratings with high sensitivity is concluded.
- 社団法人日本磁気学会の論文
- 2004-11-01
著者
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Visnovsky S
Charles University Faculty Of Mathematics And Physics
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Visnovsky S.
Institute of Physics, Charles University of Prague
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Mistrik J.
Research Institute of Electronics, Shizuoka University
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Yamaguchi T.
Research Institute of Electronics, Shizuoka University
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Antos R.
Research Institute of Electronics, Shizuoka University
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Aoyama M.
Research Institute of Electronics, Shizuoka University
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Hillebrands B.
Department of Physics, University of Kaiserslautern
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Mistrik J.
Research Institute Of Electronics Shizuoka University
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Hillebrands B
Department Of Physics University Of Kaiserslautern
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Antos R.
Research Institute Of Electronics Shizuoka University
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- Characterization of permalloy wires by optical and magneto-optical spectroscopy(Magneto-Optical Effect and Measurement)
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