High-frequency Properties of CoZrNb/Fe-C Multilayer Films
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概要
- 論文の詳細を見る
High permeability of 〜500 up to the GHz frequency range was observed in a CoZrNb/Fe-C multilayer film deposited by using a facing-target sputtering apparatus at room temperature. It was found that the Fe-C layer played a key role in increasing the saturation magnetization and the anisotropy field of the multilayer film sufficiently to raise the ferromagnetic resonance frequency beyond 2.0GHz. The multilayer film was soft magnetic when the thickness of the Fe-C layer was 5-50nm. The Fe-C layer exhibited a columnar growth feature, and the aspect ratio of the column increased with increasing the Fe-C layer thickness. Magnetic anisotropy perpendicular to the film plane appeared in multilayer films with Fe-C layer thicknesses of 〜80nm and above.
- 社団法人日本磁気学会の論文
- 2003-05-01
著者
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Osaka T.
Department of Applied Chemistry, Waseda University
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YAMAZAKI Y.
Department of Materials Science, Graduate School of Engineering, Tohoku University
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Choi K.-k.
Materials Research Center Tdk Corporation
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MURASE T.
Materials Science & Engineering, Meijo Univ.
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Yokoshima T.
Department of Applied Chemistry,Waseda University
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Kitamoto Y.
Department of Innovative and Enginnered Materials,Tokyo Institute of Technology
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Yokoshima T.
Department Of Applied Chemistry Waseda University
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Murase T.
Materials Research Center Tdk Corporation
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Kitamoto Y.
Department Of Agricultural Chernistry Faculty Of Agriculture Tottori University
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Kitamoto Y.
Department Of Innovative And Enginnered Materials Tokyo Institute Of Technology
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