F-1106 高感度トワイマン・グリーン干渉計による固体表面の微小変形計測(J25-2 光学的手法・弾性的性質)(J25 機械力学,材料力学,エンジン関連の計測技術)

概要

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High-sensitivity Twyman-Green interferometer is developed to measure the small change of the thickness of transparent plate specimens. A half-mirror is placed in an arm of a common Twyman-Green interferometer. Multiple reflection of light occurs between the half-mirror and a mirror of the Twyman-Green interferometer. A specimen exists between them. The light wave that passes through the specimen 2n times interferes with the reference light wave, and makes interference fringes that show the contours of the specimen thickness. The contrast of interference fringes decreases with increasing the number of the multiple reflection, that is, with increasing sensitivity. A common image processing software is applied to increase the contrast of the fringes. It is possible to make the interferometer that is twice as sensitive as the common Twyman-Green interferometers.
社団法人日本機械学会の論文
2001-08-22