P-MN-03 NANOFABRICATION OF SILICON BY MECHANO-CHEMICAL PROCESSING AND ITS APPLICATION TO ETCHING MASK FOR POTASSIUM HYDROXIDE SOLUTION
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概要
- 論文の詳細を見る
Nanometer scale protuberance and groove were processed on a silicon surface by diamond tip sliding using atomic force microscope (AFM) in an atmosphere. To produce the three dimensional nano profile, the processed profile dependence on load was evaluated, and then KOH solution etching was applied on the processed surface. Mechanochemically processed protuberance, groove and flat (undeformed) processed areas act as etching mask for KOH solution.
- 一般社団法人日本機械学会の論文
著者
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Kim Jongduk
Department Of Faculty Of Engineering Nippon Institute Of Technology
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Miyake Shojiro
Department Of Faculty Of Engineering Nippon Institute Of Technology
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Yamamoto Hirokazu
Department Of Pediatrics Nagasaki University School Of Medicine
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Yamamoto Hirokazu
Department Of Faculty Of Engineering Nippon Institute Of Technology
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YAMAMOTO Hirokazu
Department of Environmental Chemistry and Technology, Tottori University
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