PW-06 VIBRATION ISOLATION SYSTEM FOR SEMI-CONDUCTOR LITHOGRAPH MACHINE

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概要

• 論文の詳細を見る

• In order to increase vibration rejection ratio for semi -conductor lithograph machines, we developed serial active vibration isolation system in which two isolation systems placed in series. Each isolation system is composed by air mount and VCM (voice coil motor). This report shows optimization of mechanics and control for serial isolation system.

• 一般社団法人日本機械学会の論文

著者

• Makinouchi Susumu

  Development Management Department Precision Equipment Company Nikon Corporation

• Takahashi Masato

  1^<st> Design Section Development Management Department Precision Equipment Company Nikon Corp

• TAKAHASHI Masato

  1^ design section, Development Management Department, Precision Equipment Company, Nikon Corpora

関連論文

• PW-06 VIBRATION ISOLATION SYSTEM FOR SEMI-CONDUCTOR LITHOGRAPH MACHINE

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