PW-04 INVESTIGATION OF VACUUM COMPATIBLE HYDROSTATIC AIR BEARINGS

概要

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Results on the investigation of vacuum compatible hydrostatic air bearings are presented. The hydrostatic air bearings consist of three pumping grooves and labyrinths around the bearings and put in a vacuum chamber for test. The sealing effects of labyrinth width and clearance, and the sensitiveness of pumping ducts for the chamber pressure were investigated. The theoretical results show that the outer labyrinth width L_3 and the diameter of outer pumping duct D_3 are the most sensitive parameters, and the chamber pressure P_c decreases exponentially with L_3 and D_3 increase. On the other hand, the chamber pressure P_c increases in quadric with the labyrinth clearance g increases. It was found that the theoretical result agrees with the experiment qualitatively.
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