OD-01 STICTION FREE CAPACITIVE ACTUATORS USING DOUBLE SACRIFICIAL LAYERS PROCESS

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概要

• 論文の詳細を見る

• In order to solve in-use stiction problem, we have proposed a new method using square pyramids structure that are formed on the substrate. These square pyramids were made in sacrificial layers consisting of two qualitatively different silicon oxide films. According to etching rate difference between two sacrificial layers, the square pyramids can be obtained. We have fabricated capacitive actuators to confirm experimentally our newly proposed stiction free sacrificial layer releasing technique. As a result of experiment, it has revealed our double sacrificial layers process to be an effective method preventing in-use stiction.

• 一般社団法人日本機械学会の論文

著者

• Yamada Koichi

  Strategics R & D Planning Group Advanced Technology R & D Center Mitsubishi Electric Corpora

• Fukami Tatsuya

  Sensing Technology Department Advanced Technology R & D Center Mitsubishi Electric Corporation

• FUJITA Jun

  Sensing Technology Department, Advanced Technology R & D Center, Mitsubishi Electric Corporation

• ITOH Takahiko

  Sensing Technology Department, Advanced Technology R & D Center, Mitsubishi Electric Corporation

• Itoh Takahiko

  Sensing Technology Department Advanced Technology R & D Center Mitsubishi Electric Corporation

• Fujita Jun

  Sensing Technology Department Advanced Technology R & D Center Mitsubishi Electric Corporation

関連論文

• OD-01 STICTION FREE CAPACITIVE ACTUATORS USING DOUBLE SACRIFICIAL LAYERS PROCESS

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