HDI-18 Development of a head COC thickness measuring method by means of AES without ion sputtering

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概要

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• Carbon over coat (COC) for head is one of important technologies in hard-disk-drive (HDD). Thickness of the film is about 4-5 nm. Evaluation of the film is quite important. In order to measure thickness of COC quickly and precisely in narrow area, we propose a new method by means of Auger electron spectroscopy (AES) without ion sputtering.

著者

• Tagashira Yoshiyuki

  Materials Laboratory Head Media Business Unit Hitachi Global Storage Technologies Japan Ltd.

• MATSUMURA Sumihiro

  Materials Laboratory, Head Media Business Unit, Hitachi Global Storage Technologies Japan Ltd.

関連論文

• HDI-18 Development of a head COC thickness measuring method by means of AES without ion sputtering

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