HDI-17 Improvement of DLC overcoat by controlling hydrogen content and its application to lower flying height hard disk medium

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概要

• 論文の詳細を見る

• The relation between hydrogen contents in DLC overcoat of a hard disk medium and its head flyability was studied. The effect of additional gasses such as N_2 and N_2O was also investigated. It was found that the hydrogen content in DLC affects the magnetic head flyability and it is effective to add N_2O in the atmosphere of DLC deposition process not only to obtain sufficient amount of functional groups but also to reduce hydrogen content of the DLC overcoat. The results of glide test showed drastic improvement of head flyability by decreasing the hydrogen/carbon ratio.

• 一般社団法人日本機械学会の論文

著者

• Tani Hiroshi

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

• SHODA Mitsuhiro

  Media Engineering, Hitachi Global Storage Technologies Japan, Ltd.

• KOZAKI Tomonori

  Media Engineering, Hitachi Global Storage Technologies Japan, Ltd.

• ONO Toshinori

  Media Engineering, Hitachi Global Storage Technologies Japan, Ltd.

• MATSUMOTO Hiroyuki

  Media Engineering, Hitachi Global Storage Technologies Japan, Ltd.

• KOKAKU Yuichi

  Media Engineering Department, Hitachi Global Storage Technologies, Ltd.

• Ono Toshinori

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

• Kokaku Yuichi

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

• Shoda Mitsuhiro

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

• Kozaki Tomonori

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

• Matsumoto Hiroyuki

  Media Engineering Department Hitachi Global Storage Technologies Ltd.

関連論文

• HDI-22 The Glide Noise Caused by Organic Hydrocarbon on DLC Overcoat of Magnetic Recording Disk
• HDI-17 Improvement of DLC overcoat by controlling hydrogen content and its application to lower flying height hard disk medium

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