HDI-09 A POLARISATION INTERFEROMETER FOR FLYING HEIGHT MEASUREMENT DOWN TO NEAR-CONTACT

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概要

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• Optical interferometry, amongst other techniques such as capacitive and the read back signal method, is a well established technique for the measurement of small displacements [1]. Previously, heterodyne interferometry [2] and phase-shifting interferometry [3] have been used to make high resolution measurement of such small displacements. However, these existing methods are generally only feasible for low speed measurement applications. A polarisation interferometer has been designed and built to measure dynamically the flying height down to near-contact.

著者

• Clegg Warwick

  Faculty Of Science Victoria University Of Wellington

• JENKINS David

  CRIST, Department of Communication and Electronic Engineering, University of Plymouth

• LIU Xinqun

  CRIST, Department of Communication and Electronic Engineering, University of Plymouth

• Liu Xinqun

  Crist Department Of Communication And Electronic Engineering University Of Plymouth

• Jenkins David

  Crist Department Of Communication And Electronic Engineering University Of Plymouth

関連論文

• HDI-09 A POLARISATION INTERFEROMETER FOR FLYING HEIGHT MEASUREMENT DOWN TO NEAR-CONTACT

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