MC-03 SYMMETRICAL PIEZOELECTRIC MICROACTUATORS FOR MAGNETIC DISK DRIVES
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概要
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We have developed a novel piezoelectric microactuator for the head-slider drive dual-stage actuator systems in magnetic disk drives. This microactuator is based on a symmetrical structure and a symmetrical operation. The piezoelectric actuator devices used in the system are simple rectangular multilayered structure. A prototype model with pico-slider and the head suspension has been tested to demonstrate 0.8μm displacement at a dc applied voltage of 30V and fundamental resonant frequency over 20kHz.
著者
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Koganezawa S.
Hdd Development Department Fujitsu Limited
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Hida M.
Materials And Environmental Engineering Laboratories Fujitsu Laboratories Ltd.
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Kurihara K.
Materials and Environmental Engineering Laboratories Fujitsu Laboratories Ltd.
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Mita T.
Materials and Environmental Engineering Laboratories Fujitsu Laboratories Ltd.