WS-05 BIO-INSPIRED DIGITAL NANOACTUATORS AND BRANCHED ELECTRODE MOTION DETECTORS

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概要

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• This paper presents bio-inspired nanoactuators and banched electrode nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Fabrication errors and electrical noise in MEMS cause the major difficulty to achieve high-precision actuation and detection capabilities. For the nano-precision actuation, we solve the fabrication instability and electrical noise problems using bio-inspired digital actuators with nonlinear mechanical modulators. For the high-precision capacitive detection, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.

• 一般社団法人日本機械学会の論文

著者

• Cho Young

  Digital Nanolocomotion Center Department Of Biosystems Korea Advanced Institute Of Science And Techn

• Cho Young

  Digital Display Lab. Lg Electronics

関連論文

• Posttreatment-Dependent Current Degradation and Role of Tube Length on Morphology of Printed Carbon Nanotube Field Emitters
• WS-05 BIO-INSPIRED DIGITAL NANOACTUATORS AND BRANCHED ELECTRODE MOTION DETECTORS
• Posttreatment-Dependent Current Degradation and Role of Tube Length on Morphology of Printed Carbon Nanotube Field Emitters

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