The Vertical Traverse Stage in Vacuum Condition

概要

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A vertical traverse wafer positioning stage was developed for X-ray stepper application in synchrotron radiation (SR) as an X-ray source. To ensure high accuracy of movement in vacuum /low-pressure helium conditions, the stage construction was split up into a coarse stepping stage and a fine positioning stage. For the coarse stepping stage, a linear air hydrostatic bearing (LAB) with a noncontact sealing device was developed to avoid lubrication problems. For the fine positioning stage, a multiaxis leaf spring guided and piezoelectric actuators employed stage was developed to attain high rigidity. The air leakage rate from each noncontact sealing device was less than 5.7x10^<-4> Pa・m^3/sec, so that the pressure of the vacuum chamber could reach 3 x 10^<-3> Pa. Experiments on the coarse stepping stage show rotational movement error such as pitching and yawing to be less than ±6μrad with a repeatability of less than ±1μrad. The multiaxis fine positioning stage is also proved to have a sufticient small movement error.
一般社団法人日本機械学会の論文
1990-03-15