605 LIGAプロセス製大変位マイクロXYステージ(マイクロ)(機素潤滑設計部門企画セッション)

スポンサーリンク

概要

• 論文の詳細を見る

• In this paper, in order to realize large displacement micro-stages, we propose a serially-arranged, electrostatic comb-drive XY-stage. We discuss the design and fabrication process of a metal sputtered PMMA micro-actuators. The micro XY-stage, which was fabricated by this research, was made with the LJGA fabrication process. It has serially arranged electrostatic comb-drive actuators. The designed single unit size of the XY-stage, including electrodes, is about 5 mm square, 100 μm range in the horizontal direction is serially arranged, while the vertical direction is 50 μm range with a single comb set. The movable range was determined theoretically and experimentally.

• 2000-03-01

著者

• 堀江 三喜男(

  特別研究員

• 金 金光

  東工大・精研

関連論文

• 605 LIGAプロセス製大変位マイクロXYステージ(マイクロ)(機素潤滑設計部門企画セッション)

スポンサーリンク