119 高周波プラズマ法で作成する金属超微粒子の粒径制御の検討(生産技術及び製品開発II)

概要

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The ultrafine particles (UFPs) were produced using an RF plasma method under various producing conditions, and the possibility of particle size control of UFPs was studied. The experimental results were summarized as follows. (1) When the pressure within the apparatus was low, the particle size control of UFPs was possible by changing concentration of two atom molecule gas in the plasma gas. (2) The specific surface area increased when the pressure within the apparatus was low. (3) The specific surface area of UFPs at chamber 2 was largest. (4) The specific surface area of UFPs decreased as the concentration of metal vapor in the plasma gas increased. These results were discussed from the view point of the effect of the temperature of plasma gas, the concentration of metal vapor in the plasma gas and a metal vapor freezing time.
社団法人日本機械学会の論文
2000-06-23