634 Design of a new Hot Embossing equipment for fabrication of microstructures
スポンサーリンク
概要
- 論文の詳細を見る
We present a new design of hot embossing equipment for fabrication of microstructures. This equipment mainly consists of upper and lower heating plates, vacuum chamber, force frame, alignment system for double side embossing, and de-embossing forces measurement system. This equipment has great potential to various experiments of the fabrication microstructures using hot embossing.
- 一般社団法人日本機械学会の論文
著者
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Mekaru H.
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Yamada T.
Graduate School of Engineering, Himeji Institute of Technology
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Ishigaki H.
Graduate School of Engineering, Himeji Institute of Technology
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Maeda R.
National Institute of Advanced Industrial Science and Technology
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Hattori T.
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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Hattori T.
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Ishigaki H.
Graduate School Of Engineering Himeji Institute Of Technology
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Hattori T.
Laboratories RCA, Inc.
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