504 ANALYZING NANOMECHANICAL PROPERTIES OF CUTTING TOOLS FOR NANOMANUFACTURING
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概要
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We report a novel method for nanomechanical characterization and Young's modulus determination of a nanosize silicon (100) tip cutting tool. These tools (aspect ratio >1 : 10) are shaped using focused ion beam (FIB) machining. Currently, we are developing a novel nanometer-scale mechanical machining system-on-a-chip (SOAC) based on these tools. Thus, proper characterization of their mechanical properties is of significant importance for top-down nanomanufacturing. Real time imaging of the controlled bending of this nano tool was performed in situ in the transmission electron microscope (TEM) utilizing a unique piezo-controlled in-situ indenter. Nanomechanical analysis was performed by coupling video frames of the bending behavior with calibrated voltage data from piezo crystal. This permits direct determination of the Young's modulus of the nano tool. Nanomechanical analysis was also performed using finite element analysis (FEA).
- 一般社団法人日本機械学会の論文
著者
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Sood Dinesh
Department Of Mechanical Engineering University Of Arkansas
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Schmidt William
Department Of Mechanical Engineering University Of Arkansas
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Virwani Kumar
Department of Mechanical Engineering, University of Arkansas
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Malshe Ajay
Department of Mechanical Engineering, University of Arkansas
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Stach Eric
Lawrence Berkley Laboratories (LBL), University of California
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Minor Andrew
Lawrence Berkley Laboratories (LBL), University of California
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Stach Eric
Lawrence Berkley Laboratories (lbl) University Of California
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Malshe Ajay
Department Of Mechanical Engineering University Of Arkansas
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Minor Andrew
Lawrence Berkley Laboratories (lbl) University Of California
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Virwani Kumar
Department Of Mechanical Engineering University Of Arkansas