127 Fabrication of Micro Diamond Tools by Truing and Micro Machining of Brittle and Ductile Materials

概要

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This study describes the fabrication and dressing techniques of the micro grinding tools and also highlights on the potentials of these tools with some micro machining test results on hard and brittle materials like silicon and quartz glass. Micro machining test also carried out for stainless steel to test the cutting ability on ductile materials. Cylindrical type micro diamond tools of 100-200μm in diameter have been fabricated by truing using a diamond grinding wheel as truer. Different dressing techniques have been tested to find a suitable one for the fabricated tools. The dressing techniques tested are very simple but quite effective and that made the micro grinding tools ease to apply for machining. Machining test results on quartz glass, silicon and stainless steel have been illustrated with SEM photographs and after that machined surface topography has been analyzed. And an average surface roughness for silicon is about 100 nm, which opens a possibility for machining of hard and brittle materials with good surface quality.
一般社団法人日本機械学会の論文