104 Experimental Quantization of Surface and Sub-Surface Structure in Float Polished Crystalline Quartz

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概要

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• The float polishing process is widely recognized for its ability to produce surfaces to atomic conformance, with extremely high flatness. AT-cut, premium-Q, cultured, crystalline-quartz acoustic resonators were fabricated recently by a float polishing process. The study was conducted to maximize the stress-fracture threshold, by optimizing the fabrication process to eliminate sub-surface damage. Polishing medium and removal were examined as variables. The best results obtained, for quartz resonators polished with colloidal silica, are a surface roughness of less than 0.2-nm rms by AFM, and a near-bulk value of pre-fracture flexural strength of 620 MPa. This indicates that float polishing produces a factor of 10 improvement in the strength and the overall quality of quartz over the conventional CeO_2 process.

• 一般社団法人日本機械学会の論文

著者

• Schubert Soares

  Ultrafast Sensors & Applications

• Namba Yoshiharu

  Chubu University

• Namba Yoshiharu

  Chubu University Dept. Of Mechanical Engineering

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