TED-AJ03-194 HEAT TRANSFER ANALYSIS IN RADIATIVELY HEATED HIGH-TEMPERATURE CIRCULATOR FOR PURE WATER USED FOR SEMI-CONDUCTOR PROCESSING

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概要

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• Heat transfer is analyzed in a radiation heater of pure water, and an appropriate method to treat the wavelength dependent property values of the system is studied. The heater is composed of quartz glass tube using halogen lamp as the heating device. High quality quartz glass is used for the tube to minimize the elution of impurities and particle emission. A bar shaped halogen lamp is installed in a inner tube of a concentric quartz glass tubes, and the pure water flowing through between the two concentric tubes is heated directly by the radiation of the lamp. In the present study, non-gray radiative transfer analysis is carried out. For the analysis, the materials used in the system are modeled as follows. (1) The surface of the tungsten filament of the halogen lamp is treated as diffuse with a wavelength dependent spectral emissivity. (2) The cover glass of the halogen lamp is treated as an absorbing-emitting layer with a wavelength dependent spectral absorption (3) The quartz glass tubes are treated as absorbing layers with a wavelength dependent spectral absorption coefficient. (4) Water is treated as an absorbing layer with a wavelength dependent spectral absorption coefficient. (5) Reflection and refraction are assumed at the glass tube surfaces. To study the effect of the way to divide the wavelength region on the accuracy of the calculated absorbed energy profile in the radiative water heater system in non-gray radiative transfer analysis, four cases are considered. (case 1) Divide the wavelength range of 0-30μm into 5000 sub-ranges uniformly, which is the reference case. (case 2) Divide the wavelength range of 0-30μm into 500 sub-ranges uniformly. (case 3) Divide only the wavelength range in which the spectral absorption coefficient varies widely. The division number is 50. The wavelength ranges for water and quartz glass are 0.7 -2.5μm and 3.5 -5.0μm respectively. The wavelength range of 0-30μm is divided into 104 sub-ranges. (case 4) In the same way as the case 3,the division number is 10. The wavelength range of 0-30μm is divided into 24 sub-ranges. (case 5) In the same way as the case 3,the division number is 2. The division wavelengths are 1.1μm and 4.5μm for water and quartz glass respectively. The wavelength range of 0-30μm is divided into 4 sub-ranges. From the analysis, following results are obtained. To obtain the absorbed energy profile in the water layer with a good accuracy, the wavelength range in which the spectral absorption coefficient varies widely should be divided into around 10 sub-ranges. The wavelength ranges for the sub-range division for water and quartz glass are 0.7 -2.5μm and 3.5 -5.0μm respectively. For the purpose to obtain only the total absorbed energy by the whole water layer, it is sufficient to divide the wavelength region into two sub-regions, transmitting region and opaque region. The division wavelengths are 1.1μm and 4.5μm for water and quartz glass respectively.

• 一般社団法人日本機械学会の論文

著者

• Ogawa Tomohiko

  Division Of Mechanical Science Graduate School Of Engineering Hokkaido University

• KADOTANI Kanichi

  Komatsu Ltd.

• Kudo Kazuhiko

  Division Of Human Mechanical Systems And Design Graduate School Of Engineering Hokkaido University

• MOCHIDA Akeno

  Division of Mechanical Science, Graduate School of Engineering, Hokkaido University

• Mochida Akeno

  Division Of Mechanical Science Graduate School Of Engineering Hokkaido University

• Kadotani Kanichi

  Komatsu

• KUDO Kazuhiko

  Division of Mechanical Science Graduate School of Engineering, Hokkaido University

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• TED-AJ03-194 HEAT TRANSFER ANALYSIS IN RADIATIVELY HEATED HIGH-TEMPERATURE CIRCULATOR FOR PURE WATER USED FOR SEMI-CONDUCTOR PROCESSING

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