TED-AJ03-212 Thermal analysis of CO_2 laser processing of fused silica glass
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概要
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Material processing of glass using high intensity lasers is becoming increasingly important to the microfabrication of optical systems such as planar lightwave circuits and other integrated optics platforms. The fast thermal cycle created by a laser can induce structural changes in the glass that are important to optical and mechanical properties. These changes can be identified through the fictive temperature of the glass and correlated with wet chemical etch rates. An experiment is performed in which high purity fused silica glass samples are thermally processed using a continuous-wave (CW) CO_2 laser, and then wet chemical etched in buffer HF acid. The glass etch rate is determined as a function of depth over the course of etching. The experimental results show that the silica glass etch rate in the laser treated zone is increased by up to 108% when compared to the untreated glass region. In addition the etch rate changes dramatically at a depth that defines thermal penetration along the centerline of the laser treated area. A three dimensional thermal model is developed to analyze the CO_2 laser processing of silica glass. The temperature field in the silica glass can be determined from the model, and the thermal penetration depth (related to the glass softening point) can be estimated. Numerical results are compared with experimental etch measurements of fused silica. The calculated thermal penetration depth from the model is within 5% of the depth where the etch rate is experimentally found to have a dramatic change. Therefore this analysis can be used to determine the depth to which the laser processing induces micro-structural change as related to the optical properties. Furthermore, the thermal analysis model can be used to guide anisotropic wet chemical etching of silica glass after laser processing in future microfabrication.[figure]
- 一般社団法人日本機械学会の論文
著者
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Zhao Jian
Dept. Of Mechanical And Environmental Engineering University Of California
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Bennett Ted
Dept. of Mechanical and Environmental Engineering, University of California
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Bennett Ted
Dept. Of Mechanical And Environmental Engineering University Of California