TED-AJ03-424 Operating Characteristics of Micro-Machined Bubble-Drive Micropumps

スポンサーリンク

概要

• 論文の詳細を見る

• A bubble generated in a confined space moves toward a wider space because of surface tension effects. We are studying a thermal micropump using this phenomenon to develop a passive local cooling system with a built-in micropump driven by waste heat. In the micropump, a vapor bubble is formed in a confined diverging channel by heating; then, the bubble itself or vapor in the bubble transfers in a diverging direction. Such a bubble-drive thermal micropump works more actively in a smaller channel and requires no mechanical moving parts; therefore, it is suitable for a micro-cooling system. This paper describes basic characteristics of two types of thermal micropump using water or ethanol : a glass-tube type and a silicon micro-machined type. The glass tube type micropump has a converging-diverging section in the tube with sub-millimeter inner diameter. When the diverging section is heated locally, an isolated bubble is formed; it moves in the diverging direction with oscillation and then disappears in the unheated section. This bubble behavior repeats and thereby creates the pump effect. Maximum pump pressure under a high input power condition exceeded theoretical predictions in which the surface tension effect generates a pressure differential between the minimum inner diameter point and the maximum one. The silicon type micropump in Fig. A1 was assembled by bonding a glass plate with a silicon plate on which a converging-diverging channel was fabricated by a micro-machine process. The bubble generated in the channel by local heating remained and oscillated in the direction of the channel axis. Moreover, the channel wall between two liquid-vapor interfaces appeared to dry. Working fluid was consequently pumped in the diverging direction. Pump performance increased with reduced throat width as shown in Fig. A2,and with increasing temperature in the diverging section. The pump effect was generated by the vapor bubble in the diverging channel regardless of the continuity of the surrounding liquid phase. This verifies its utility for designing a passive heat transfer device.[figure]

• 一般社団法人日本機械学会の論文
• 2003-00-00

著者

• Nakabeppu Osamu

  Department Of Mechanical Sciences And Engineering Tokyo Institute Of Technology

• Seki Kenzaburo

  Department of Mechanical and Aerospace Engineering Tokyo Institute of Technology

• Ohko Kenichi

  Department of Mechanical Sciences and Engineering Tokyo Institute of Technology

関連論文

• Heat Transport Characteristics of Micro-Loop Heat Pipe with Capillary Pump Structure
• Microscale Real Temperature Measurement by the AFM using Thermal Feedback Method
• A25-125 GAS ABSORPTION OF SLUG FLOW IN MICROCHANNEL
• Temperature Measurements of Vicinities of Boiling Bubble Nuclei with MEMS Sensor
• Heat and Electron Transport at Point Contact
• TED-AJ03-424 Operating Characteristics of Micro-Machined Bubble-Drive Micropumps
• TED-AJ03-304 ACTIVE AND PASSIVE THERMAL IMAGING IN SCANNING THERMAL MICROSCOPY
• Interferometric Measurement of the Liquid-Phase Temperature Field around an Isolated Boiling Bubble

スポンサーリンク