Investigation of the Propagation of the Heavy Monoatom Beam

概要

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In this paper, the numerical analyses on the behavior of a heavy monoatom beam are presented. Some numerical methods for the analysis of rarefied gas flow have been proposed thus far, which have been successfully applied to the flow of Kn<1, such as in the semiconductor manufacturing processes and other vacuum technologies. However, since the atomic number density of the beam is extremely low, the flow here is categorized as molecular (Kn>1), in which the atomic free path is rather large compared with the representative scale of the beam. Hence, the probability density function of the atomic free path in the nonequilibrium field was taken into account in the numerical simulation of the beam propagation. Consequently, the calculated results of the beam diffusion due to mutual atomic scattering agreed well with the measured data obtained using gadolinium vapor.
一般社団法人日本機械学会の論文
1992-08-15